JPH0339834U - - Google Patents
Info
- Publication number
- JPH0339834U JPH0339834U JP10138389U JP10138389U JPH0339834U JP H0339834 U JPH0339834 U JP H0339834U JP 10138389 U JP10138389 U JP 10138389U JP 10138389 U JP10138389 U JP 10138389U JP H0339834 U JPH0339834 U JP H0339834U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- chamber
- load lock
- cvd apparatus
- elevator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10138389U JPH0339834U (en]) | 1989-08-30 | 1989-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10138389U JPH0339834U (en]) | 1989-08-30 | 1989-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0339834U true JPH0339834U (en]) | 1991-04-17 |
Family
ID=31650340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10138389U Pending JPH0339834U (en]) | 1989-08-30 | 1989-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0339834U (en]) |
-
1989
- 1989-08-30 JP JP10138389U patent/JPH0339834U/ja active Pending